Generation of micro/nano hybrid surface structures on copper by femtosecond pulsed laser irradiation

Abstract The delamination of copper lead frames from epoxy molding compounds (EMC) is a severe problem for microelectronic devices, as it leads to reduced heat dissipation or circuit breakage. micro/nanoscale surface structuring promising method improve the copper–EMC interfacial adhesion. In this study, generation micro/nano hybrid structures on surfaces through femtosecond pulsed laser irradiation proposed were realized by generating nanoscale laser-induced periodic (LIPSS) microscale parallel grooves. Several types generated changing polarization direction, fluence, and scanning speed. At specific aspect ratio microgrooves, latticed structure was sides microgrooves combining LIPSS formation direct interference patterning. This study provides an efficient adhesion improvement between EMC.